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利用臭氧消毒水和淡氟氢酸清洗技术,使设备生产厂家的单晶圆旋转清洗工艺适应向小型生产线转入的应用,从而使生产周期的缩短成为可能。
The use of ozone disinfection of water and hydrogen fluoride cleaning technology, equipment manufacturers to adapt to single-wafer rotary cleaning process to the small-scale production line into the application, so that the shortening of the production cycle possible.