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将光学薄片用作敏感元件，利用激光干涉原理，将离子束刻蚀深度的信息转换为可测的激光干涉条纹的移动信息。这对微光学元件的离子束微细加工具有现实意义。对敏感元件与传感元件间的耦合进行了探讨，给出了振动误差的抑制措施。
The optical sheet is used as a sensitive element, and the principle of laser interference is used to convert the information of ion beam etching depth into measurable movement information of laser interference fringes. This is of practical significance for the micro-fabrication of ion beam micro-optics. The coupling between the sensitive element and the sensing element is discussed, and the measures to restrain the vibration error are given.