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为了解决无防弧功能的磁控靶三相整流直流电源在放电过程中电弧对磁控溅射镀膜工业化生产的影响，根据灭弧电路功能和电弧判别方法设计了三种类型的三相可控硅整流电弧电路，有效地抑制了该整流电源电弧造成的危害，大幅度提高了磁控溅射功能，改善了膜层的均匀性和一致性，提高了产品的成品率。
In order to solve the influence of arcing on the industrialized production of magnetron sputtering coating during the discharge process of the magnetron target three-phase rectified DC power supply without arc protection, three types of three-phase controllable are designed according to the function of arc extinguishing circuit and the arc discriminating method Silicon rectifier arc circuit, which effectively suppressed the damage caused by the arc rectification power supply, greatly improved the magnetron sputtering function, improve the film uniformity and consistency, and improve the product yield.