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近年来,由于在空间研究、激光聚变、光化学和分析化学方面应用的需要,人们对真空紫外光学膜层更为关注。并已研制出一些高效膜层以满足其需要。在1200～2000 区,对材料的限制较可见及红外区更为严格,使得宽带反射器的平均反射率不超过80～85％。1973年首次出现的用于真空紫外的多层电解质膜新技术,使得激光反射器在1460 处具有高达95％的反射率。已研制出的在某一光谱区具有最大反射率、而在另一光谱区具有高透射率的分色镀层,用于长波激光器在紫外区激发,紫外激光谱线的拉曼频移和产生紫外谐波。已制造出超窄带干涉滤光片,多层分色反射滤光片和中性密度滤光片以满足火箭光谱学方面的应用,因为透镜和激光光学件镀有高效紫外AR膜层。本文简要介绍了目前商用紫外膜层技术及其特殊应用及对应于波长的反射与透射曲线,介绍了测试装置与方法。
In recent years, due to the need of applications in space research, laser fusion, photochemistry and analytical chemistry, people pay more attention to the vacuum UV optical coatings. And have developed some efficient film to meet their needs. At 1200-2000 ° C, the material limitations are more visible and the infrared region is more stringent, making broadband reflectors with an average reflectance of no more than 80-85%. The new multilayer polyelectrolyte membrane technology for vacuum UV was first introduced in 1973 with a reflectivity up to 95% at 1460 激. Has developed a maximum reflectance in a spectral region, and in the other spectral region with high transmittance of the color separation coating for long-wave laser excitation in the ultraviolet region, the UV laser spectral Raman frequency shift and generate ultraviolet harmonic. Ultra-narrowband interference filters, multilayer dichroic reflectance filters and neutral density filters have been manufactured to meet the needs of rocket spectroscopy as lenses and laser optics have been coated with an efficient UV AR film. This paper briefly introduces the current commercial UV film technology and its special applications and corresponding to the wavelength of the reflection and transmission curves, introduced the test device and method.