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基于电晕放电原理的气体传感器利用局部高电场将样本气体电离,根据电离特性进行气体识别。宏观尺度下的电晕放电特性研究较多,但对于微尺度下的电晕放电特性研究尚未深入。以直径为20μm的镍铬丝作为放电电极,搭建了单针–板结构电晕放电器件,研究其在不同间距下的放电过程。实验结果表明:当电极间距d≤0.2 mm时,放电直接发展为火花放电;当电极间距d≥0.5 mm时,初始阶段放电不稳定;随放电电压的增大,输出信号由低频率脉冲阶段逐渐转变为稳定电晕放电,且电极间距越大,起晕电压越高,不稳定电晕阶段越短,初始阶段脉冲幅值越小。以上结果为微尺度下负电晕放电气体传感器的研究提供了理论依据。
The gas sensor based on the principle of corona discharge uses the local high electric field to ionize the sample gas, and recognizes the gas according to the ionization characteristics. There are many studies on the characteristics of corona discharge at the macro level, but the research on the characteristics of the corona discharge at the micro scale has not been further studied. A nickel-chromium wire with a diameter of 20μm was used as a discharge electrode. A single needle-plate structure corona discharge device was set up to study the discharge process under different pitches. The experimental results show that when the distance between electrodes is less than or equal to 0.2 mm, the discharge directly develops into a spark discharge. When the electrode spacing is d ≥ 0.5 mm, the discharge in the initial stage is unstable. With the increase of the discharge voltage, the output signal gradually decreases from the low- Into a stable corona discharge, and the greater the electrode spacing, the higher the corona onset voltage, the shorter the unstable corona stage, the smaller the initial stage pulse amplitude. The above results provide a theoretical basis for the research on the negative corona discharge gas sensor at the microscale.