研究了光泵浦垂直外腔面发射激光器(OPS-VECSEL)的湿法腐蚀工艺,采用快速腐蚀和精细选择腐蚀相结合的腐蚀方法,使得衬底能被干净地腐蚀掉,并精确停留在阻挡层,得到高平整度的外延片表面,提高了泵浦效率,降低了散射损耗。从理论上分析了外延片表面粗糙度与OPS-VECSEL斜率效率的关系,得出如果在外延片上镀一层λ/4单介质增透膜,能进一步提高VECSEL的斜率效率。 The wet etching process of the optical pumped vertical external-cavity surface-emitting laser (OPS-VECSEL) was studied. The etching method combined with rapid etching and fine selective etching made the substrate corrode cleanly and stopped exactly Layer to obtain a high flatness of the epitaxial wafer surface, increasing the pumping efficiency and reducing the scattering loss. The relationship between the surface roughness of epitaxial wafer and the slope efficiency of OPS-VECSEL is theoretically analyzed. It is concluded that the slope efficiency of VECSEL can be further improved if a λ / 4 single layer antireflection coating is deposited on the epitaxial wafer.