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由 C_(60)和类金刚石碳膜（ DLC）组成的多层复合膜可在 Si、 玻璃和其它衬底上通过真空升华 沉积和随后以 CH4和 H2作为反应剂用射频化学气相沉积（ RFCVD） 的方法制备。这种膜的若干 特征可由拉曼谱（ Raman）表征。复合膜电阻与介电常数由低频（ LF）阻抗分析仪进行研究从而得 到膜电阻、介电常数和频率间的关系。这些结果表明：在各种频率下的此类复合膜的电阻与纯 C_(60) 膜基本一致，但是纯 C_(60)膜随频率变化的电容率与复合膜明显不同。这些现象与结果可通过电 介质的德拜模型和介质松弛理论进行分析与讨论。根据相应的 Debye模型方程式，实验测得的 介电常数和频率间的关系经计算机拟合，得到了复合膜的松弛时间，介电常数等。拟合结果基本 上与实验数据一致。
Multi-layer composite films composed of C 60 and DLC films can be deposited by vacuum sublimation deposition on Si, glass and other substrates followed by radio-frequency chemical vapor deposition (RFCVD) using CH 4 and H 2 as reactants Method of preparation. Several features of this film can be characterized by Raman spectroscopy. The composite membrane resistance and dielectric constant are studied by a low frequency (LF) impedance analyzer to obtain the relationship between membrane resistance, dielectric constant and frequency. These results show that the resistance of the composite films at all frequencies is almost the same as the pure C 60 film, but the permittivity of the pure C 60 films varies significantly with the frequency of the composite film. These phenomena and results can be analyzed and discussed through dielectric Debye model and relaxation theory. According to the corresponding Debye model equation, the relationship between dielectric constant and frequency was experimentally fitted by computer, and the relaxation time and dielectric constant of the composite membrane were obtained. The fitting result is basically consistent with the experimental data.