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This paper reports a kind of linear piezoelectric inchworm motor us-ing ultrasonic clamping vibrator with ring-shaped three-pile piececonstruction.The clamping vibrator and guide shaft of the motor constitutethe friction pair.The ratio of moving friction coefficient to static one is about1:10,when the clamping vibrator is in resonance.The driving peak voltage ofthe clamping vibrator is only 120V(V_(p-p)).The velocities of the motor are0-2 mm/min,the driving force is about 0.2 kgf,and the mechanic resolvingpower is less than 50nm.The motor’s technique is simple.
This paper reports a kind of linear piezoelectric inchworm motor us-ing ultrasonic clamping vibrator with ring-shaped three-pile piececonstruction. The clamping vibrator and guide shaft of the motor constitute the friction pair. The ratio of moving friction coefficient to static one is about1: 10, when the clamping vibrator is in resonance. The driving peak voltage of the clamping vibrator is only 120V (V_ (pp)). The velocities of the motor are 0-2 mm / min, the driving force is about 0.2 kgf, and the mechanic resolvingpower is less than 50nm. The motor’s technique is simple.