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介绍用磁控溅射制作的从大气往真空约覆盖5个量程的“绝对型”电容薄膜真空规，以及与该真空规配套的真空计的电路。该真空计测量范围为1．3～105Pd，真空规与电容信号检测电路置于同一金属壳内，以避免外界干扰。规的恒温胜温度波动小于±0．1℃，有效地降低了温度的影响。电路的非线性小于0．4％，高真空下北输出漂移小于0．1％，在13～105Pa各量程内，最大校准误差小于读数的4％。
Introduced by magnetron sputtering produced from the atmosphere to the vacuum cover about 5 ranges of “absolute” capacitance film vacuum gauge, and vacuum gauges supporting the vacuum circuit. The gauge measures the range of 1.3 ~ 105Pd, vacuum gauge and capacitance signal detection circuit placed in the same metal shell, in order to avoid external interference. Regulated temperature wins wins temperature fluctuations less than ± 0.1 ℃, effectively reducing the impact of temperature. The non-linearity of the circuit is less than 0.4%, and the north output drift is less than 0.1% under high vacuum. The maximum calibration error is less than 4% of the reading in each range of 13-105Pa.