论文部分内容阅读
面向高温环境应用的微纳传感器在燃气轮机健康监控、地热井环境监控等领域具有广泛的应用前景。该文主要介绍了一种基于AlN薄膜和α-SiC衬底的声表面波谐振器,讨论了谐振器的应变敏感性来源,提出了一种基于应变场-波速关系计算谐振器应变敏感系数的方法。采用微纳米加工工艺加工了谐振器,并进行了材料表征。测量了谐振器的应变敏系数:具有1.5μm厚AlN压电薄膜的AlN/α-SiC基声表面波谐振器在298K下应变敏感系数为0.515×10-6/με,与计算结果具有较好一致性。
Micro-nano sensors for high temperature applications have wide application prospects in the fields of gas turbine health monitoring, geothermal well environment monitoring and the like. In this paper, a surface acoustic wave resonator based on AlN film and α-SiC substrate is introduced. The source of strain sensitivity of the resonator is discussed. A method based on strain field-wave velocity relationship is proposed to calculate the strain-sensitive coefficient method. The micro-nano processing technology is used to process the resonator and characterize the material. The strain-sensitive coefficient of the resonator was measured: the AlN / α-SiC-based surface acoustic wave resonator with 1.5μm thick AlN piezoelectric thin film had a strain-sensitive coefficient of 0.515 × 10-6 / με at 298K, which was in good agreement with the calculated result consistency.