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CVI反应器内气体的输运对基体的沉积速度与沉积质量有重要的影响。本文介绍了一种基于TiCl4与H2 O反应产生TiO2 烟雾而设计的发烟系统 ,能使模拟CVI反应器内复杂的与不可观察的气体流动现象可视化。该系统结构简单、可操作性强 ,形成的烟流总量与密度可调且长时间可视、均匀。流场照片表明其发烟效果很好 ,能满足CVI反应器内气体流场的显示研究。
The transport of gas in the CVI reactor has a significant influence on the deposition rate and deposition quality of the substrate. This paper presents a smoke system based on the reaction of TiCl4 with H2O to produce TiO2 fumes, which visualizes the complex and unobservable gas flow phenomena in a simulated CVI reactor. The system has the advantages of simple structure and strong maneuverability, and the total quantity and density of smoke formed are adjustable and visible and even for a long time. Flow field photos show that the smoke effect is very good, can meet the CVI reactor gas flow field display study.