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本文介绍了一种采用电子倍增阴极的新型高抽速离子泵,并论述了用试制的第一台泵所得到的实验结果。为了提高离子泵的抽速,电子倍增阴极作为电子源具有优良的特性,郎:(1)用纯金属如Al作冷阴极,不会污染真空环境,(2)电子发射密度高,(3)与其它提供电子的方法相比,能够大大增加所提供的电子数,(4)能够容易地将电子供到很宽的区域· 实验结果表明,在低于10~(-4)帕的真空度下,单位泵体积的最大放电电流达到普通离子泵的30倍·因此,建议用这种引人注目的阴极与普通离子泵组合成一种高抽速离子泵·
This paper presents a new high-pumping ion pump with an electron multiplying cathode and discusses the experimental results obtained with the first prototype pump. In order to improve the pumping speed of the ion pump, the electron multiplying cathode has excellent characteristics as an electron source. Lang: (1) Pure metal such as Al for the cold cathode does not pollute the vacuum environment, (2) electron emission density is high, and (3) Compared with other methods of providing electrons, the number of electrons provided can be greatly increased, (4) Electrons can be easily supplied to a wide area, and the experimental results show that at a vacuum below 10 -4 Pa , The maximum discharge current per unit pump volume is 30 times that of a conventional ion pump. Therefore, it is recommended that this attractive cathode be combined with a common ion pump to form a high-pumping ion pump