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表面分析仪概观对固体表面的元素进行分析的表面分析仪,是大约10年前左右出现的,现正在迅速地普及之中。在金属技术、半导体技术领域内,薄膜应用与表面处理技术的发达,使表面分析作为可能解决各个界面(表面)物性的重要问题而受到注意。称为“表面分析仪”的这一名称,是分析原理迥异的若干仪器的总称。所以笔者为了对这些表面分析仪更明确地进行定义,作
SURFACE ANALYZER OVERVIEW Surface analyzers, which analyze elements of solid surfaces, appeared about 10 years ago and are rapidly gaining popularity. In the field of metal technology and semiconductor technology, the development of thin film applications and surface treatment technologies has drawn attention to surface analysis as an important issue that may solve the physical properties of various interfaces (surfaces). This name, called Surface Analyzer, is a general term for several instruments that analyze very different principles. So I in order to more clearly define these surface analyzers, for