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为研究表面弯曲对利用多色散斑测量表面粗糙度的影响,引入表面曲率半径,通过模拟粗糙表面以及其形成的多色散斑场,讨论了不同曲率半径的粗糙曲面对模拟散斑场和散斑延长率的影响。结果表明,引入粗糙表面的曲率半径,对三色激光散斑自相关测量法是可行的。粗糙表面曲率半径越大,其模拟的散斑场和计算的散斑延长率与平直的粗糙表面越接近。曲率半径越大,散斑延长率愈大,并且表面粗糙度测量误差越小。因此,在实际测量中,应该考虑表面弯曲对测量粗糙度精度的影响。
In order to study the effect of surface curvature on the measurement of surface roughness by multicolor speckle, the radius of curvature of the surface is introduced. By simulating the rough surface and the multi-color speckle field formed by it, the effects of rough surface with different radius of curvature on simulated speckle field and dispersion Effect of spot elongation. The results show that the radius of curvature of the rough surface is feasible for the three-color laser speckle auto-correlation measurement. The larger the radius of curvature of a rough surface, the closer the simulated speckle field and the calculated speckle extension rate are to a straight, rougher surface. The larger the radius of curvature, the greater the speckle extension, and the smaller the measurement error of the surface roughness. Therefore, in actual measurement, the influence of surface bending on the measurement accuracy of roughness should be considered.