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采用射频等离子体增强化学气相沉积(RF-PECVD)方法在316L钢衬底上沉积类金刚石薄膜,比较类金刚石薄膜在油和水润滑下分别与氮化硅和316L钢材料对磨的摩擦和磨损性能。实验结果显示:类金刚石/氮化硅摩擦对偶在合成油的润滑下具有最低的摩擦系数和磨损率;在空气中的摩擦系数和磨损量相比,类金刚石/氮化硅摩擦对偶添加合成油减小了45.8%的摩擦系数和94.4的磨损量。添加蒸馏水可以有效减小类金刚石薄膜的摩擦系数和磨损量,与空气中的摩擦系数相比,类金刚石/氮化硅摩擦对偶和类金刚石/316L钢摩擦对偶在蒸馏水润滑下的摩擦系数分别减小了44.8%和51.3%。在对磨损要求较为宽松的应用场合,蒸馏水可以为类金刚石/氮化硅摩擦对偶和类金刚石/316L钢摩擦对偶提供足够的润滑。
Diamond-like carbon films were deposited on 316L steel substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). The friction and wear of diamond-like carbon films with silicon nitride and 316L steel were compared respectively under oil and water lubrication performance. The experimental results show that diamond / silicon nitride friction pair has the lowest friction coefficient and wear rate under the lubrication of synthetic oil. Compared with the wear amount, the friction coefficient and the wear amount of diamond / silicon nitride couple the synthetic oil A friction coefficient of 45.8% and a wear of 94.4 are reduced. Adding the distilled water can effectively reduce the friction coefficient and wear amount of the diamond-like carbon film. Compared with the friction coefficient in the air, the friction coefficient of the diamond-like silicon nitride friction couple and that of the diamond-like diamond / 316L steel under the lubrication of distilled water decrease 44.8% smaller and 51.3% smaller. In applications requiring less wear and tear, distilled water provides adequate lubrication for diamond-like / silicon nitride friction pairs and diamond-like carbon / 316L steel friction pairs.