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为解决微小型机电系统大行程、高精度进给的问题,设计实现了一种由旋转电机驱动的摩擦传动微进给机构。采用对称预紧设计使加于摩擦传动主支承轴承上的预紧正压力的合力为零、从而减少传动误差。当步进电机采用5万步/转细分驱动时,经减速比为10:1的摩擦传动机构,输出直线位移分辨率可达到0.16μm。位移测试实验显示该摩擦传动微进给机构具有可靠的运动传递性能,系统的位移输出特性基本上取决于所采用的步进电机及细分驱动电路的特性。进给速度可通过改变驱动脉冲的频率调节,机构在高频驱动大位移动作时亦表现出准确的步进特性,可用于小型机电系统的开环进给驱动。
In order to solve the problem of large-stroke and high-precision feed of micro-electromechanical system, a friction-driven micro-feed mechanism driven by a rotary motor is designed and realized. The symmetrical pre-tightening design makes the resultant force of the pre-tensioned positive pressure applied to the main bearing of the friction transmission zero, thus reducing the transmission error. When the stepper motor with 50,000 steps / turn subdivision drive, the friction reduction gear ratio of 10: 1, the output linear displacement resolution can reach 0.16μm. Displacement tests show that the friction drive micro-feed mechanism has a reliable motion transfer performance, and the displacement output characteristics of the system basically depend on the characteristics of the stepper motor and the subdivision drive circuit adopted. The feed speed can be adjusted by changing the frequency of the driving pulse. The mechanism also shows accurate stepping characteristics when the high-frequency driving large displacement is applied. It can be used for the open-loop feeding drive of the small electromechanical system.