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本文扼要介绍最近研制的激光两座标测量仪的主体结构、所采用的基本干涉测长系统、以及由此演变而来的可补偿阿贝原则误差的干涉系统、小角度干涉仪、空气折射率干涉仪等共四种干涉系统。还介绍了为提高仪器导轨运动精度而采用的工作台运动的小角度和直度误差的随机检测和伺服校正系统,以及测头沿横向运动的直度检测和修正系统。对应用激光干涉测长中使用的细分和单位变换方法及两座标定位测头也作了简单介绍。
This article briefly introduces the main structure of the recently developed laser two-coordinate measuring instrument, the basic interferometric length measuring system used, and the resulting interferometry system that can compensate Abbe’s principle error, small angle interferometer, air refraction index Interferometer, a total of four kinds of interference system. The stochastic detection and servo calibration system for the small angle and straightness error of the workbench movement used to improve the precision of the rail of the instrument and the straightness detection and correction system of the probe along the lateral movement are also introduced. The subdivision and unit transformation methods used in laser interferometry and the two coordinate positioning probes are also briefly introduced.