按照传统的定义 ,微型机电系统 (MEMS)一般都配备有运动部件 ,在小型化中需要遵守多种标准 ,比如 ,如何用传感器捕捉信息 ,如何对捕捉到的信息进行电子处理 ,然后再将信息传出 ,以供应用。整个系统是互相联系在一起的 ,并配以适当的外部封装 ,以寻求最佳的自主性。然而 ,CEA公 Traditionally, microelectromechanical systems (MEMS) are generally equipped with moving parts that need to comply with a variety of criteria in miniaturization such as how to capture information with sensors, electronically process the captured information, and then send the information Out, for the application. The entire system is interrelated, with appropriate external packaging, in order to seek the best autonomy. However, CEA public