激光沉积的类金刚石膜是红外窗口增透保护膜的极佳选择。采用波长248 nm的纳秒脉冲激光沉积硅基底类金刚石膜,研究了不同脉冲能量对膜层光学性能、机械硬度及内应力等工程应用参数的影响。实验发现,随着准分子激光脉冲能量的提高,类金刚石膜样品的红外透射率和表面硬度逐步提高,表明高能量有利于沉积光学级类金刚石保护膜;但同时,膜层的内应力也随着激光脉冲能量的提高而增大,不利于膜层在基底上的附着,需要采用其他技术和工艺消除内应力过大的问题。分析结果为纳秒脉冲激光沉积类金刚石膜的研究提供了实践基础。 Laser-deposited diamond-like carbon film is an excellent choice for infrared window anti-glare coatings. The effects of different pulse energies on the engineering parameters such as optical properties, mechanical hardness and internal stress were studied by laser deposition of diamond-like carbon films at 248 nm. The experimental results show that with the increase of excimer laser pulse energy, the infrared transmittance and surface hardness of diamond-like carbon films gradually increase, indicating that high energy is good for depositing optical grade diamond-like carbon films. At the same time, The increase of the laser pulse energy increases, which is not conducive to the attachment of the film on the substrate, and other techniques and processes are needed to eliminate the problem of excessive internal stress. The analysis results provide a practical basis for the study of nanoclustering laser-deposited diamond-like carbon films.