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本文分析了涡轮分子泵和拖动分子泵抽气机理的不同物理图象,并论证了短叶片涡轮分子泵的抽气作用是这二种分子泵抽气机理同时作用的结果,从而,这种泵具有涡轮分子泵和拖动分子泵的共同优点。
In this paper, the different physical images of the pumping mechanism of turbo-molecular pump and drag-driven molecular pump are analyzed. It is also demonstrated that the pumping action of the turbo-molecular pump with short blades is the result of the simultaneous action of the two pumping mechanisms of the molecular pump. Pumps have the same advantages of turbomolecular pumps and molecular drag.