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以层状钙钛矿结构铁电薄膜Pt/SrBi2 Ta2 O9/Pt(Pt/SBT/Pt)三明治结构薄膜电容系统为例 ,研究了铁电薄膜高场耗散效应 .详细讨论了铁电薄膜高场漏电特性、击穿特性和瞬变电流特性以及铁电薄膜高场耗散效应产生的机理 .发现SBT薄膜漏电机制是从体限制过渡到电极限制为主 ,击穿电场与电极有效面积的对数成负线性关系 ,瞬变电流与极化反转无关 .理论分析与实验结果一致 .
A high-field dissipation effect of ferroelectric thin films was investigated by using a layered perovskite thin-film ferroelectric Pt / SrBi2 Ta2 O9 / Pt (Pt / SBT / Pt) sandwich capacitor system as an example. Field leakage characteristics, breakdown characteristics and transient current characteristics and the mechanism of the high-field dissipation effect of the ferroelectric thin films.It is found that the leakage mechanism of the SBT thin film is the transition from the body to the electrode limit, the breakdown electric field and the effective area of the electrode The number of negative linear relationship, the transient current has nothing to do with the polarization inversion.The theoretical analysis and experimental results.