本文主要研究不同淀积角度对一氧化硅薄膜感湿特性的影响,目的在于探索用倾斜蒸发工艺制备感湿膜的可能性,实验结果表明:随着蒸发一氧化硅入角度的增大,特别是大于45°时,元件吸湿性显著增大。因此,可以考虑用倾斜蒸发的方法制造一氧化硅薄膜湿度传感器。 In this paper, we mainly study the influence of different deposition angles on the wet-feel characteristics of SiO thin films. The purpose of this paper is to explore the possibility of preparing wet-sensitive films by oblique evaporation. The experimental results show that with the increase of evaporation angle, When it is more than 45 °, the hygroscopicity of the element is significantly increased. Therefore, it is considered that the silicon monoxide film humidity sensor is manufactured by oblique evaporation.