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文章对高温超导薄膜红外探测器进行了基本理论分析,给出了器件设计思想,并报导了用高TcGdBa2Cu3O7-x薄膜制备的单元红外探测器,2×2阵列红外探测器的实验结果。在液氮温度下得到的最好结果是噪声等效功率NEP(500,10,1)=3.8×10-12WHz-1/2,探测率D*=1.7×1010cmHz1/2W-1,响应度Rv=3312VW-1。器件经过十多次的冷热循环,并在室温下保存一年以上。所得测量结果基本不变。
In this paper, the fundamental theoretical analysis of high temperature superconducting thin film infrared detector is given, and the device design concept is given. The experimental results of the unit infrared detector and 2 × 2 array infrared detector prepared with high TcGdBa2Cu3O7-x thin film are also reported. The best results obtained at liquid nitrogen temperature are noise equivalent power NEP (500,10,1) = 3.8 × 10-12 WHz-1/2, detection rate D * = 1.7 × 1010 cmHz1 / 2W-1 , Responsivity Rv = 3312VW-1. Device after more than 10 cycles of cold and heat, and at room temperature for more than a year. The result of the measurement is basically the same.