论文部分内容阅读
静电驱动的微机械装置是许多微机电系统(MEMS)中的重要模块。根据微光机电系统(MOEMS)可编程相位光栅的设计思想,提出一种静电驱动的微机械元件(微梁)作为可编程光栅的基本结构元件,并以ANSYS软件的有限元分析为依据,对其结构模型作较深入的研究,探讨了各主要结构参数及控制电压对结构驱动性能的影响。结果表明,在设计尺度范围内,微梁主要结构参数按照对光带变形的影响大小排列分别为微梁厚度、微梁变形前与衬底间的距离及微梁长度.
Electrostatically driven micromechanics are important modules in many micro-electromechanical systems (MEMS). According to the design idea of MOEMS programmable phase grating, an electromechanically driven micro-mechanical element (micro-beam) is proposed as the basic structural element of programmable grating. Based on the finite element analysis of ANSYS software, The structural model is studied in more depth. The influence of the main structural parameters and the control voltage on the structural driving performance is discussed. The results show that the thickness of the micro-beam, the distance between the micro-beam before the deformation and the substrate and the length of the micro-beam are mainly arranged according to the influence on the deformation of the light beam within the design scale.