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采用30kW高功率直流等离子体喷射CVD技术制备了自支撑金刚石膜的新型结构,通过使甲烷与氢气的浓度比随沉积时间变化的方法,制备了两层、三层和四层结构。扫描电镜结果显示所制备的层结构是由柱状晶和非常细晶粒组成的,而拉曼谱结果表明这层细晶粒具有纳米金刚石的激光散射特征。在甲烷与氢气的浓度比超过15%的沉积条件下,我们发现一种新形貌,这种形貌是由具有非常好的刻面的晶粒构成的。
A novel structure of self-supporting diamond films was prepared by high-power DC plasma jet CVD at 30kW. Two-layer, three-layer and four-layer structures were prepared by changing the concentration ratio of methane to hydrogen with deposition time. Scanning electron microscopy results show that the prepared layer structure is composed of columnar crystals and very fine grains, and Raman spectroscopy results show that this layer of fine grains has the characteristics of nano-diamond laser scattering. In the deposition conditions where the concentration ratio of methane to hydrogen is more than 15%, we find a new morphology consisting of grains with very good facets.