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为了测试长焦距激光光学系统焦距,对基于自准直原理的焦距测试精度进行了理论分析,提出了一种采用光纤激光器、分光镜、平面镜、精密测角仪、电荷耦合器件(CCD)探测器和波前采集系统的焦距测试方法。通过自行设计的波前采集系统测试被测激光光学系统透射波前,使光纤点源置于其焦点位置。由CCD探测器扫描自准直点源像面,通过扫描定焦算法,使CCD探测器置于最佳像面位置。旋转平面镜使精密测角仪和CCD探测器同步采集,通过精密测角仪获取平面镜旋转的角度和质心法判读点源像移动的线量,获取被测激光光学系统的焦距。采用此方法对焦距为7171mm的激光光学系统焦距进行测试,并对测试结果进行分析,扩展不确定度为13.48mm(k=2)。结果表明,该方法可满足长焦距激光光学系统的焦距测试要求。
In order to test the focal length of the long focal length laser optical system, the focal length testing accuracy based on the self-collimation principle is theoretically analyzed. An optical fiber laser, a spectroscope, a plane mirror, a precision goniometer, a charge coupled device (CCD) And focal length acquisition system focal length testing methods. The self-designed wavefront acquisition system is used to test the transmitted wavefront of the laser optics system to be tested, so that the fiber optic point source is placed at its focal point. The CCD detector scans the self-collimated point source image plane, and the CCD detector is placed in the best image plane position by scanning the defocus algorithm. Spinning plane mirror enables the precision goniometer and CCD detector to be collected synchronously. Through the precision goniometer, the angle of rotation of the plane mirror and the amount of movement of the point source image by the centroid method are obtained to obtain the focal length of the laser optical system under test. The focal length of the laser optical system with the focal length of 7171mm was tested by this method. The test results were analyzed with an extended uncertainty of 13.48mm (k = 2). The results show that this method can meet the focal length testing requirements of long focal length laser optical system.