为了精确控制超光滑加工过程中磨头的运动轨迹,从而实现光学元件材料去除的均匀稳定,研究了超光滑加工的后置处理算法。分析了超光滑加工工艺的特点和相应的超光滑机床的机械结构,建立了机床的坐标系统,构造了机床的运动学模型。对于光学元件母线为任意平面曲线的情况,研究了磨头运动轨迹的等误差直线逼近算法。在曲率半径为290mm,相对口径为1∶2.9的凹球面上进行了超光滑加工实验。结果表明,利用所述算法可以精确地控制磨头的运动轨迹,从而保证材料去除的稳定性。 In order to precisely control the movement path of the grinding head in the ultra-smooth machining process, the uniform and stable removal of the optical element material is achieved. The post-processing algorithm of the ultra-smooth machining is studied. The characteristics of the ultra-smooth machining process and the corresponding mechanical structure of the ultra-smooth machine are analyzed. The coordinate system of the machine tool is established, and the kinematics model of the machine tool is constructed. For the case that the optical element bus is an arbitrary plane curve, the equal error linear approximation algorithm of the grinding head movement trajectory is studied. In the radius of curvature of 290mm, the relative diameter of 1: 2.9 on the concave spherical surface of the ultra-smooth processing experiments. The results show that the algorithm can be used to precisely control the movement of the grinding head, so as to ensure the stability of material removal.