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基于厚度为10μm的钡铁氧体薄膜设计,制备了共面波导结构的毫米波薄膜环行器.这种薄膜环行器不需要外加磁体,在34 GHz和37.6 GHz显示出环行特性,其非互易效应大于15 dB.结果表明,采用共面波导结构可以实现薄膜环行器.这种薄膜环行器具有和单片微波集成电路集成的潜在应用.
A millimeter-wave thin film circulator with a coplanar waveguide structure was fabricated based on a barium ferrite thin film with a thickness of 10μm. The thin-film circulator showed no ringing behavior at 34 GHz and 37.6 GHz without external magnets. The effect is greater than 15 dB.The results show that the use of coplanar waveguide structure can be achieved film circulator.This film circulator has integrated with monolithic microwave integrated circuits potential applications.