本文介绍了一种流量传感器新的工作原理:当流体流过加热的芯片时,为保持芯片温度恒定所需功耗的改变,可以用来作为流体速度的量度。本文用CMOS工艺首次实现了这种原理的集成流量传感器。该传感器结构简单、尺寸小(1×1.9mm),灵敏度高(在芯片温度55℃、流体温度30℃、流速50cm/s时,输出达80mW)。 This article describes a new working principle of a flow sensor: As fluid flows through a heated chip, the change in power needed to keep the chip temperature constant can be used as a measure of fluid speed. This paper first realized this principle of integrated flow sensor with CMOS technology. The sensor has the advantages of simple structure, small size (1 × 1.9mm) and high sensitivity (the output is up to 80mW at a chip temperature of 55 ℃, a fluid temperature of 30 ℃ and a flow rate of 50cm / s).