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介绍的氧传感器基本构成是:在陶瓷基片上印制多孔型金属氧化物厚膜(50～100μm)和金属电极,并在此膜层上以等离子体溅射法涂覆陶瓷保护层(见图1)。因此机械强度好、所检测的气体中的氧气能够迅速地扩散进这种多孔性的膜层中,传感器阻值
The basic composition of the oxygen sensor is described as follows: a porous metal oxide thick film (50 ~ 100μm) and a metal electrode are printed on a ceramic substrate, and a ceramic protective layer is coated on the film by a plasma sputtering method 1). So the mechanical strength is good, the oxygen in the detected gas can rapidly diffuse into the porous membrane layer, the sensor resistance