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介绍了一种高功率激光装置中用于X光实验的精确靶定位系统.该系统采用数字散斑相关测量的方法,其理论精度为0.01个像素。整套系统在实际运用中的误差小于8μm。该系统与计算机控制的步进电机配合使用,具有自动化程度高、大视场高精度和非接触性等优点。
An accurate target positioning system for X-ray experiments in a high-power laser device is introduced.The method uses digital speckle correlation measurement with a theoretical accuracy of 0.01 pixel. The error of the whole system in actual use is less than 8μm. The system with the use of computer-controlled stepper motor, with a high degree of automation, large field of view high-precision and non-contact advantages.