钙钛矿型氧化物薄膜由于在未来微电子学和光子学器件等领域的美好应用前景，而备受人们的注目．钙钛矿型氧化物材料众多，且具有丰富的物理特性，如：介电、铁电、铁磁、绝缘、导电、超导以及光学非线性等。然而，这些氧化物材料中氧原子的化学计量配比，对薄膜的晶体结构和物 Perovskite-type oxide films have attracted much attention because of their promising applications in the fields of microelectronics and photonics devices in the future. Perovskite type oxide material is numerous, and has a wealth of physical properties, such as: dielectric, ferroelectric, ferromagnetic, insulating, conductive, superconducting and optical nonlinearity. However, the stoichiometric ratio of oxygen atoms in these oxide materials, the crystal structure and the content of the thin film