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采用磁控溅射技术制备了MoS_2,Ti/MoS_2,Pb/MoS_2和Pb-Ti/MoS_2复合薄膜.通过AFM,SEM和XRD对薄膜的形貌和结构进行分析;利用纳米压痕仪,CSM摩擦试验机和Bainano高真空摩擦试验机分析薄膜的力学和摩擦学性能,并探讨了Pb、Ti掺杂对薄膜的结构,力学和摩擦学性质的影响.结果表明:Pb-Ti/MoS_2复合薄膜具有非常致密的结构,表面光滑平整,且具有较高的硬度;Pb、Ti共掺杂显著提高MoS_2薄膜在RH75%高湿度环境下和真空环境下的摩擦学性能,在潮湿大气和真空环境下磨损率分别为未掺杂MoS_2的13%和25%,且低于单一掺杂MoS_2薄膜.PbTi/MoS_2复合薄膜优异的摩擦学性能得益于Pb掺杂元素增加薄膜结构的致密度和Ti掺杂元素提高薄膜的抗氧化和力学性能.
MoS_2, Ti / MoS_2, Pb / MoS_2 and Pb-Ti / MoS_2 composite films were prepared by magnetron sputtering.The morphology and structure of the films were analyzed by AFM, SEM and XRD. The mechanical and tribological properties of the films were analyzed by using a Tester and a Bainano high vacuum tribometer. The effects of Pb and Ti doping on the structure, mechanical properties and tribological properties of the films were also discussed. The results show that the Pb-Ti / MoS_2 composite films have Very dense structure with smooth and smooth surface and high hardness. The co-doping of Pb and Ti significantly improves the tribological properties of MoS_2 film under RH75% RH and vacuum environment and wear under humid atmosphere and vacuum Rate respectively 13% and 25% of undoped MoS_2, and lower than the single doped MoS_2 films.The excellent tribological properties of PbTi / MoS_2 composite films due to Pb doping elements increase the density of the film structure and Ti doping Elements improve the film’s oxidation resistance and mechanical properties.