论文部分内容阅读
本文对自主开发研制的一种可用于纳米聚焦离子束系统的液态金属Ga离子源进行了不同温度下发射特性实验,测定了在三种引出电压下不同温度该离子源的I-T特性曲线,同时测定了在三种发射电流下离子源引出极电压和实验温度的关系曲线,并对这些曲线进行了分析。实验结果表明:随着温度升高,液态金属表面张力减小,导致发射阈值电压降低;在同一引出电压下,温度越高,发射电流越大。本文的实验结果可以为合理有效地设计液态金属离子源提供启示。
In this paper, a kind of self-developed liquid metal Ga ion source that can be used in the nanofocus ion beam system was tested under different temperature emission characteristics. The IT characteristics of the ion source at different temperatures were measured at the same time. The curves of ion source extraction voltage and experimental temperature at three emission currents were analyzed and the curves were analyzed. The experimental results show that as the temperature increases, the surface tension of the liquid metal decreases, resulting in a decrease of the emission threshold voltage; at the same extraction voltage, the higher the temperature, the larger the emission current. The experimental results in this paper can provide inspiration for the design of liquid metal ion source reasonably and effectively.