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本文应用“20～420keV离子注入机”对铁,镍,18Cr-8Ni不锈钢进行了硼离子能量为100keV,剂量分别为4×10~(15)离子/cm~2及1×10~(16)离子/cm~2的注入试验。对铍进行硼离子能量为80keV及剂量为2×10~(17)离子/cm~2的注入,并经620℃一小时的真空退火处理。通过离子探针(IMS)分析,证明硼在这些金属中的纵向浓度,近似的呈高斯分布。经显微硬度的测量,Fe、Ni、18Cr-8Ni经注入B~+后,金属的表面显微硬度伍都得到不同程度的提高。特别是金属铍注硼后,再经过真空退火,其表面硬度从HV300kg/mm~2提高到HV≥2318kg/mm~2。
In this paper, boron ion energies of 100keV, 4 × 10 ~ (15) ions / cm ~ 2 and 1 × 10 ~ (16) ions were measured for the iron, nickel and 18Cr-8Ni stainless steel with “20 ~ 420keV ion implanter” Ion / cm ~ 2 injection test. The beryllium was implanted with 80 keV of boron ions and 2 × 10 17 ions / cm 2, and annealed at 620 ℃ for one hour. By ion probe (IMS) analysis, boron in these metals to prove the vertical concentration, the approximate Gaussian distribution. After the micro-hardness measurement, Fe, Ni, 18Cr-8Ni after injection of B ~ +, the surface hardness of the metal Wu have been increased to varying degrees. In particular, boron beryllium metal injection, and then through the vacuum annealing, the surface hardness increased from HV300kg / mm ~ 2 to HV ≥ 2318kg / mm ~ 2.