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本文对1989年6月26日至30日在瑞士蒙特洛举行的第五届国际固态传感器与执行器会议进行综合介绍。重点指出该领域的技术发展:如硅微系统技术与硅微机械加工技术,硅片直接组合技术,多功能与集成技术,最后提出一些讨论和建议。
This paper presents the 5th International Solid State Sensor and Actuator Conference held in Montero, Switzerland from June 26 to June 30, 1989. It points out the technological development in this field, such as silicon micro-system technology and silicon micromachining technology, silicon direct combination technology, multi-function and integration technology, and finally puts forward some discussions and suggestions.