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本文研究软Ｘ光Ｗ／Ｓｉ多层镜色散特性，多层镜与Ｘ射线二极管（ＸＲＤ）配合，用于激光等离子体发射软Ｘ射线诊断，通过与滤片－ＸＲＤ探测结果比较，估计给出ｗ／Ｓｉ（ｄ＝２．４７ｎｍ）在光子彼长λ＝１．８９ｎｍ处的能量分辨及反射率。
In this paper, the dispersion characteristics of soft X-ray W / Si multilayer mirrors are studied. The multi-layer mirrors and X-ray diodes (XRD) are used in the soft X-ray laser plasma jet emission diagnosis. The energy resolution and reflectivity of w / Si (d = 2.47 nm) at the photon length λ = 1.89 nm.