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针对现有光学加工抛光头运动方式由于光栅形或螺旋形等对称扫描方式带来的运动轨迹间的迭代误差,提出随机轨迹抛光运动方式。随机轨迹方法通过随机轨迹算法随机生成镜面离散点的抛光顺序和抛光轨迹,采用随机轨迹驻留时间补偿方法控制镜面离散点的驻留时间,对各个点进行相应大小的材料去除。实验结果显示,随机轨迹方法产生的抛光运动轨迹表现为混乱分布,从而把运动轨迹间的迭代误差均匀分布在整个镜面上,与规则运动轨迹方式相比降低了轨迹误差分布。
Aimed at the iterative error between the trajectories of the existing optical processing and polishing heads due to the symmetric scanning methods such as grating or spiral, a random trajectory polishing mode is proposed. The stochastic trajectory method randomly generates the polishing order and the polishing trajectory of the mirror discrete points through a stochastic trajectory algorithm. The stochastic trajectory residence time compensation method is used to control the dwell time of the mirror discrete points, and the corresponding size material removal is performed for each point. The experimental results show that the trajectories of the polishing motion generated by the random trajectory method appear as a chaotic distribution, and the iterative errors between the trajectories are uniformly distributed over the entire mirror surface, reducing the trajectory error distribution compared with the regular trajectory mode.