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采用无水溶胶-凝胶法合成了新型的TiO2/有机硅杂化材料,得到的低-OH含量的光学薄膜适合应用于光波导、光集成器件和光传感器等领域。以二苯基二羟基硅烷(Diphenylsilanediol,DPSD)、钛酸丁酯(tetrabutoxytitanate,TBT)和γ-甲基丙烯酰氧-基丙基三甲氧基硅烷(γ-methacloxypropyl trimethoxysilane,MAPTMS)为先驱体,制备出折射率可调、高透明度的有机-无机杂化光波导材料,分别在石英玻璃基片和单晶硅片上旋转涂膜得到平面光波导薄膜。用Abbe折射仪测试薄膜的折射率,用紫外-可见光-近红外分光光度计测试了薄膜的光吸收性质,用Fourier红外光谱仪和Raman光谱仪测试了薄膜的红外振动吸收光谱和Raman散射光谱并讨论了材料结构,并用棱镜耦合法测试平面光波导在632.8 nm波长下的光传输损耗。结果表明:控制Ti的加入(摩尔含量7%~22%)可以调节薄膜的折射率(1.49~1.52):平面光波导的光传输损耗约为0.7 dB/cm。此外,通过软刻蚀技术和PDMS软印章在杂化薄膜表面得到了线宽约为700 nm的光栅微结构。
A novel TiO2 / silicone hybrid material was synthesized by the anhydrous sol-gel method. The obtained low-OH content optical film is suitable for the application in optical waveguides, optical integrated devices and optical sensors. In this paper, the precursors of diphenylsilanediol (DPSD), tetrabutoxytitanate (TBT) and γ-methacloxypropyl trimethoxysilane (MAPTMS) An organic-inorganic hybrid optical waveguide material with adjustable refractive index and high transparency was prepared, and the planar optical waveguide film was obtained by spin-coating the quartz glass substrate and the monocrystalline silicon wafer respectively. The refractive index of the film was measured by Abbe refractometer. The light absorption properties of the film were measured by UV-Vis-NIR spectrophotometer. The infrared absorption spectra and Raman scattering spectra of the films were measured by Fourier infrared spectroscopy and Raman spectroscopy. The structure of the material was measured and the optical transmission loss of the planar optical waveguide at 632.8 nm was tested by prism coupling method. The results show that the refractive index (1.49 ~ 1.52) can be adjusted by controlling the addition of Ti (7% ~ 22% molar content): the optical transmission loss of the planar optical waveguide is about 0.7 dB / cm. In addition, a grating microstructure with a linewidth of about 700 nm was obtained on the surface of the hybrid film by soft etching and PDMS soft stamping.