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基于微机电系统(MEMS)微加工技术和Pb(Mg1/3Nb2/3)O3-PbTiO3(PMN-PT)电光材料设计的一维二进制码相位调制器(1D-BPM)可用于激光显示技术中的散斑消除。建立了1D-BPM数学模型,推导出电极在PMN-PT片内产生的电场和PMN-PT折射率变化导致通过的光束相位变化的关系。采用有限元分析方法仿真了电极几何尺寸对相位的影响,发现当电极尺寸在亚微米级时,两电极间相位分布不仅依赖于电极产生的电场大小,而且受到电极几何尺寸的影响。电极角效应是器件设计及优化时需考虑的重要因素。
One-dimensional binary code phase modulator (1D-BPM) based on micro-electromechanical system (MEMS) micro-fabrication and Pb (Mg1 / 3Nb2 / 3) O3-PbTiO3 (PMN-PT) electro-optic material can be used in laser display technology Speckle elimination. The mathematical model of 1D-BPM was established, and the relationship between the electric field generated in the PMN-PT chip and the phase change of the light beam caused by the change of refractive index of PMN-PT was deduced. Finite element analysis was used to simulate the influence of the electrode geometry on the phase. It was found that when the electrode size is in the sub-micron range, the phase distribution between the two electrodes depends not only on the size of the electric field generated by the electrode but also on the geometry of the electrode. The electrode angle effect is an important factor to consider when designing and optimizing the device.