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本文采用热 CVD 方法,在 ZrB_2-SiC 复合陶瓷基体上制备 CVD·SiC-C 梯度涂层。采用XRD,SEM,及 X 射线应力分析方法,研究了 CVD·SiC-C 梯度涂层的相组成、显微结构、残余应力及弯曲强度等性能。结果表明,CVD·SiC-C 梯度涂层可以缓解 SiC 与 ZrB_2基体间的热应力及界面应力,涂层中的残余应力得到明显缓解;高温退火处理对 CVD·SiC-C 涂层中的残余应力亦有缓解作用;梯度涂层显著改善了基材的弯曲强度。
In this paper, CVD-SiC-C gradient coating was prepared on ZrB_2-SiC composite ceramic substrate by thermal CVD method. The phase composition, microstructure, residual stress and flexural strength of CVD-SiC-C gradient coating were studied by XRD, SEM and X-ray stress analysis. The results show that the CVD · SiC-C gradient coating can relieve the thermal stress and interfacial stress between SiC and ZrB_2 matrix, and the residual stress in the coating can be obviously relieved. The residual stress in CVD · SiC-C coating by high temperature annealing Also have mitigation; Gradient coating significantly improved the bending strength of the substrate.