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在论述Ｘ光掠入射平面反射镜工作原理的基础上，重点讨论了超高精度Ｘ光镍平面反射镜的制备过程，研制出表面粗糙度小于１．５ｎｍ的平面反射镜。测试和使用表明：在掠入射角为５°时，该反射镜的反射率在５４％以上。
Based on the working principle of X-ray grazing incidence plane mirror, the preparation process of ultra-high precision X-ray nickel plane mirror is discussed emphatically, and the plane mirror with surface roughness less than 1.5nm is developed. Tests and applications show that at a grazing incidence angle of 5 °, the reflectance of the mirror is above 54%.