论文部分内容阅读
本文报道了120 keV B~+和170keV N~+注入聚酰亚胺(polyimide)所得改性层的精细结构.Raman光谱的分析结果表明,聚酰亚胺改性层中的碳主要以石墨和无定形两种形态存在,而它们的相对含量以及石墨微粒的大小要取决于剂量、束流强度及靶温等注入参数.本文报道的十几种离子改性聚酰亚胺中的石墨微粒尺度为20-50(?).我们还用RBS分析了改性过程中改性层化学组分的变化,这同XPS对于改性过程中各种官能团演化的研究结合在一起,支持了Raman光谱关于改性层微观结构的结论.此外我们还研究了电阻随温度的变化规律,确定了这种材料的lnρ与T~(-1/2)有很好的线性关系.这同Sheng和Abels研究过导电机制的一种非均匀系统的ρ-T关系完全一致,从而为Raman光谱结果建立起来的二者在结构上的相似性提供了进一步的证据.
In this paper, the fine structure of the modified layer obtained by injecting polyimide with 120 keV B ~ + and 170 keV N ~ + is reported.The results of Raman spectroscopy show that the carbon in the polyimide modified layer mainly consists of graphite and Amorphous morphology exist, and their relative content and the size of graphite particles depends on the dose, beam intensity and target temperature and other injection parameters.In this paper, more than a dozen ion-modified polyimide graphite particle size 20-50 (?). We also used RBS to analyze the chemical composition of the modified layer during the modification process, which is combined with the XPS study of the evolution of various functional groups in the modification process, supporting the Raman spectrum In addition, we also study the variation of resistance with temperature, and confirm that there is a good linear relationship between lnρ and T ~ (-1/2) of this material, which is the same as that of Sheng and Abels The ρ-T relationship of a non-uniform system of conduction mechanism is completely consistent, which provides further evidence for the structural similarity between the two results established by Raman spectroscopy.