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我们用TEM模式和STEM模式,在JEM—200CX扫描透射电镜+EDA×9100x射线能谱仪上,对Ge/Ag双层膜试样直径约200nm以下的同一微区进行微衍射和微分析。TEM模式的优点为:a.观察图象有较高的分辨率:b.可以方便地转到进行微衍射和微分析。实验时加速电压为200kV,试样倾斜30°,采用石墨样品台,自制Be网(图1为用电镜铜网(a)和自制Be网得到的x射线能谱图,前者铜峰太高)。插入φ100μ聚光镜光栏,得到TEM图象和选区衍射图,从图象中选择所需研究的区域进行同一微区的微衍射和微分析。将区域放在荧光屏的中心,调节光斑钮到4,用调节第二聚光镜
We performed micro-diffraction and microanalysis in the same microdiscension area of Ge / Ag bilayer membrane samples about 200 nm in diameter on a JEM-200CX scanning transmission electron microscope and an EDA × 9100x ray spectrometer using TEM and STEM modes. The advantages of the TEM mode are: a. The observed image has a higher resolution: b. It is easy to move to micro-diffraction and microanalysis. In the experiment, the accelerating voltage was 200kV and the sample was tilted by 30 °. Graphite sample stage and self-made Be network were used (Fig.1 shows the X-ray spectrum obtained by electron microscope copper net (a) and self-made Be net, . Insert the φ100μ condenser lens to get the TEM image and the diffraction pattern of the selected area. Select the desired area from the image to carry out the micro-diffraction and micro-analysis of the same micro-area. Place the area in the center of the screen, adjust the spot to 4, and adjust the second condenser