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本文系统地介绍了真空多弧源磁控溅射多功能离子镀膜机的开发情况、基本性能、主要特点、结构原理及采取的各种技术措施,评估了该设备的经济技术价值及开发者的良好心愿
This article systematically introduced the development of the vacuum multi-arc source magnetron sputtering multi-function ion coating machine, the basic performance, the main features, the structure principle and the various technical measures taken to assess the economic and technological value of the device and the developer’s Good wishes