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提出了一种用于显示的,基于透射型法布里-珀罗干涉的微机电系统(MEMS)光学调制器。基于多光束干涉原理分析了调制器的光学特性,推导出了调制器结构的特征参量。分析表明,当调制器的腔长为cλ/4时,透射光可以实现暗态显示;当调制器的腔长取为零或cλ/2时,透射光可以实现亮态显示。通过控制法布里-珀罗腔长,就可实现调制器的明暗调制。理论上证明了该调制器用于显示的可行性。设计了一种基于微机电系统的透射型法布里-珀罗光学调制器结构,该调制器的理论衬比度达到150。仿真结果表明,该调制器具有2.4 V的低电压静电驱动性能。
A micro-electro-mechanical system (MEMS) optical modulator based on transmissive Fabry-Perot interference is proposed for display. The optical characteristics of the modulator are analyzed based on the principle of multi-beam interference, and the characteristic parameters of the modulator structure are deduced. The analysis shows that when the modulator cavity length cλ / 4, the transmitted light can be displayed in dark state; when the modulator cavity length is taken to zero or cλ / 2, the transmitted light can be bright state display. By controlling the Fabry-Perot cavity length, the modulator’s light and dark modulation can be achieved. The feasibility of using the modulator for display is theoretically proved. A transmission Fabry-Perot optical modulator based on MEMS is designed. The theoretical contrast ratio of the modulator reaches 150. Simulation results show that the modulator has a low voltage of 2.4 V electrostatic drive performance.