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在高精度面形检测中,绝对标定是提高检测精度的重要方法。但在平面绝对标定中,无论是经典的三平板绝对检测还是旋转平移绝对检测都无法对平面的power项进行绝对标定。而利用液面进行绝对标定虽然可以给出完整的平面标定,但是液面易受环境影响,重复性难以提高,因此标定精度往往不高。针对这一难题,利用Fizeau干涉仪,采用液面方法对平面的power项单独进行绝对标定,结合旋转平移绝对标定方法对平面其他Zernike项进行标定,从而得到了完整的高精度的平面绝对标定。不仅提高了检测精度,也对平面进行了完整的高精度标定,大大提高了干涉仪的检测精度。
In high-precision surface detection, absolute calibration is an important method to improve the detection accuracy. However, in the plane absolute calibration, whether it is the classic three-plate absolute detection or absolute translation of rotational translation are unable to carry out absolute calibration of the power of the plane. The use of liquid level for absolute calibration although it can give a complete calibration of the plane, but the liquid level is subject to environmental impact, repeatability is difficult to improve, so the calibration accuracy is often not high. In order to solve this problem, Fizeau interferometer was used to calibrate the planar power term separately, and then the other Zernike terms were calibrated with the method of rotational translation absolute calibration to obtain a complete high-precision plane absolute calibration. Not only improve the detection accuracy, but also the plane of a complete high-precision calibration, greatly improving the detection accuracy of the interferometer.