一、前言 多栅分析器在低温等离子体诊断中是一种很有用的工具,可用于测量电子和离子间温度、密度、等离子体电位等参数。最近,我们研制出了一种新型的圆柱形分析器,结构采用电子管的形式,各栅极间不用绝缘片绝缘,而是将它们全部架空。该分析器小巧精致,性能良好。 I. Introduction The multi-gate analyzer is a useful tool in low temperature plasma diagnostics and can be used to measure parameters such as temperature, density and plasma potential between electrons and ions. Recently, we have developed a new type of cylindrical analyzer, the structure of the form of the tube, the insulation between the grid without insulation, but all of them overhead. The analyzer is compact and good performance.