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使用有限元方法分析了硅基二氧化硅波导的两种偏振补偿方法的可行性 .结果表明采用应力释放槽和调节上包层热膨胀系数都可改善波导的偏振相关性 .采用应力释放槽可以释放波导中的由于硅衬底与二氧化硅热膨胀系数失配造成的压应力 ,可以影响芯区附近的应力分布 ,但是只有释放槽的深度达到一定值时才能改善波导的偏振相关性 ,增大槽的宽度也在一定程度改善偏振相关性 ,但效果较差 .调节波导上包层的热膨胀系数可以很好的解决波导的偏振相关问题 ,而调节波导的其它层的热膨胀系数对波导的偏振相关作用较小 .
The feasibility of two polarization compensation methods for Si-based silica waveguide is analyzed by using finite element method.The results show that the polarization dependence of the waveguide can be improved by using stress relief groove and adjusting the thermal expansion coefficient of the upper cladding. The compressive stress in the waveguide due to the mismatch between the thermal expansion coefficient of silicon substrate and silicon dioxide can affect the stress distribution in the vicinity of the core region. However, the polarization dependence of the waveguide can be improved only when the depth of the release trench reaches a certain value. The width of the waveguides can also improve the polarization correlation to a certain degree, but the effect is poor.Adjusting the thermal expansion coefficient of the cladding on the waveguide can well solve the polarization related problem of the waveguide and adjust the polarization dependence of the thermal expansion coefficient of other layers of the waveguide on the waveguide Smaller.