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内建电场对提高阴极量子效率有重要作用。为获得恒定的电场强度,需要用指数掺杂方式对光电阴极激活层进行掺杂。指数掺杂实际上是一种特殊的梯度掺杂,针对这种掺杂方式,建立了指数掺杂和均匀掺杂加权的量子效率公式。实验设计了4种掺杂浓度从1019~1018cm-3掺杂样品,测量样品的光谱响应曲线和量子效率曲线,并分别用均匀掺杂量子效率公式,指数掺杂量子效率公式和新建立的梯度掺杂量子效率公式这三种方式,对量子效率曲线进行了拟合,证明了该量子效率公式具有较高的拟合精度。
The built-in electric field plays an important role in improving the cathode quantum efficiency. In order to obtain a constant electric field strength, it is necessary to doping the photocathode activation layer with exponential doping. Exponential doping is actually a special kind of gradient doping. For this doping method, the quantum efficiency formula of exponential doping and uniform doping is established. Four kinds of doping samples doped with 1019 ~ 1018cm-3 were designed. The spectral response curves and quantum efficiency curves of the samples were measured. The quantum efficiency equations of uniform doping, exponential doping quantum efficiency and new gradient Doping quantum efficiency formula of these three ways, the quantum efficiency curve fitting, proved that the quantum efficiency formula has a high fitting accuracy.